Author: | Tanirah, Omar; Kern, Dieter P.; Fleischer, Monika | |
Tübinger Autor(en): |
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Published in: |
Microelectronic Engineering
(2015), Bd.
141,
S.
215-218 |
|
Verlagsangabe: | Elsevier Science Bv | |
Language: | English | |
Full text: | http://dx.doi.org/10.1016/j.mee.2015.03.014 | |
ISSN: | 0167-9317 | |
DDC Classifikation: |
530 - Physics 600 - Technology |
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Dokumentart: | Article | |
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